No. 63 of Lousangmiao Village Songlindian Town,
Zhuozhou, Hebei, China.
EPI
MOCVD for InP, GaAs
Double rotating MOCVD system
Capacity: 15x4", 12x4", 8x6", 5x8"
Extension application: InP/GaAs; GaN, AlN
Mature program, short delivery time (6-8 months)
The whole machine has passed the SEMI-S2, SEMI-S6 certifications
High reliability and stability
Easy availability of accessories Easy maintenance
With software compatibility
With scalability of functions (TM,C2C,SMIF)
30000L maintenance cycle
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