No. 63 of Lousangmiao Village Songlindian Town,
Zhuozhou, Hebei, China.
lithography
PAS 5500/750C
Source wavelength: 248nm
Resolution: 0.13μm
Wafer size: 6, 8-inch
Multiplier: 4:1
WL: WL renovation for equipment with sizes of 6 and 8 inches
Maximum exposure field: 26mm*33mm
Overlay accuracy: 25nm
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