No. 63 of Lousangmiao Village Songlindian Town,
Zhuozhou, Hebei, China.
E-beam
E- Beam - UHV
Wafer size: 4-8 inches ;
Temperature control: RT-800 ℃;
E-gun: Ultra high vacuum linear motion E-gun;
Cleaning: Kaufman ion source
Uniformity: 4inch wafers, ±3%;
Control system: PC+PLC
Thickness measurement: film thickness gauge
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