No. 63 of Lousangmiao Village Songlindian Town,
Zhuozhou, Hebei, China.
CVD
XS Plasma 2000 PECVDM - S
Wafer size: 6pcs (4"6"8")
Wafer materials: Si, LN, LT, SiC, GaAs, GaN
Deposition films: SiO2, SiN, SiON, FSG, BPSG
Footprints: 2862 * 1162 * 2364
Applicable fields: integrated circuits, power devices, MEMS, optoelectronic LED filters, etc.
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