No. 63 of Lousangmiao Village Songlindian Town,
Zhuozhou, Hebei, China.
implanter/RTA
>XS04CM Series Implanter
Wafer size: 8 inches, 6 inches, 4 inches
Energy range (optional): 30-400keV (single charge) or 30-200keV
Injecting elements: Al, B, N, P
Maximum current intensity (optional):
Al: 3.5mA, B+: 3.5mA, N+: 3mA, P+: 4.5mA (maximum energy 400 model)
Al: 7mA, B+: 12mA, N+: 7mA, P+: 15mA (maximum energy 200 models)
Process temperature: RT-600 °C
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