Zhuozhou Xinyao Machinery Manufacturing Co., Ltd.

Detection

Pendulum degree detection instrument is used to accurately measure the Pendulum degree of the wafer, ensuring product quality. It employs high - precision sensors such as laser and capacitive sensors. The laser sensor utilizes the reflection principle. By measuring the reflection time or angle of the laser beam, it calculates the position change of the wafer to obtain the lower - pendulum amount. The capacitive sensor, on the other hand, determines the lower - pendulum amount based on the principle of capacitance change. The instrument is equipped with a high - precision data acquisition and processing system. It can measure and analyze data quickly and accurately, display results in real - time, and store and statistically analyze the data, providing a basis for quality control. It is widely used in fields with high requirements for wafer precision.

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